Vapor-Deposited Inorganic Perovskite Solar Cells from Fundamentals to Scalable Commercial Pathways

Inorganic halide perovskites have garnered significant attention as promising candidates for photovoltaic and optoelectronic applications, owing to their enhanced thermal and chemical stability relative to hybrid perovskite materials. This review synthesizes recent progress in vapor-phase deposition methodologies, such as co-evaporation, close space sublimation (CSS), continuous flash sublimation (CFS), and chemical vapor deposition (CVD), which enable the precise modulation of film composition and morphology. Advances in material systems, including the stabilization of CsPbI₂Br, the introduction of tin-doped phases, and the investigation of lead-free double perovskites like Cs₂AgSbI₆ and Cs₂AgBiCl₆, are critically evaluated with respect to their impact on device performance. The incorporation of these materials into photovoltaic devices and tandem configurations is explored, with particular emphasis on improvements in power conversion efficiency and operational durability. Furthermore, interface engineering approaches tailored to vacuum-deposited films—such as defect passivation and energy-level alignment—are examined in detail. The potential for scalable manufacturing is assessed through simulation analyses, throughput modeling, and pilot-scale demonstrations, underscoring the feasibility of industrial-scale production. By offering a comprehensive overview of these advancements, this review provides valuable perspectives on the current landscape and prospective trajectories of vapor-deposited inorganic perovskite technologies.