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Journal: Electronics, 2021
Volume: 10
Number: 2535
Article:
Fabrication of Planar Heating Chuck Using Nichrome Thin Film as Heating Element for PECVD Equipment
Authors:
by
Dong-Hyeok Im, Tae-Woong Yoon, Woo-Sig Min and Sang-Jeen Hong
Link:
https://www.mdpi.com/2079-9292/10/20/2535
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