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Journal: Electronics, 2021
Volume: 10
Number: 2535

Article: Fabrication of Planar Heating Chuck Using Nichrome Thin Film as Heating Element for PECVD Equipment
Authors: by Dong-Hyeok Im, Tae-Woong Yoon, Woo-Sig Min and Sang-Jeen Hong
Link: https://www.mdpi.com/2079-9292/10/20/2535

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