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Journal: Electronics, 2021
Volume: 10
Number: 1374
Article:
Process Optimization of Amorphous Carbon Hard Mask in Advanced 3D-NAND Flash Memory Applications
Authors:
by
Zheng Jiang, Hao Zhu and Qingqing Sun
Link:
https://www.mdpi.com/2079-9292/10/12/1374
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