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Journal: Coatings, 2019
Volume: 9
Number: 416
Article:
Optical Characterization of Non-Stoichiometric Silicon Nitride Films Exhibiting Combined Defects
Authors:
by
Jiřà Vohánka, Ivan OhlÃdal, Miloslav OhlÃdal, Å tÄ›pán Å ustek, Martin ÄŒermák, Václav Å ulc, Petr VaÅ¡ina, Jaroslav ŽenÃÅ¡ek and Daniel Franta
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https://www.mdpi.com/2079-6412/9/7/416
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