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Open AccessArticle

Design and Fabrication of Moth-Eye Subwavelength Structure with a Waist on Silicon for Broadband and Wide-Angle Anti-Reflection Property

1
Key Laboratory of Opto-electronic Measurement and Optical Information Transmission Technology, Changchun University of Science and Technology, Changchun 130022, China
2
International Research Centre for Nano Handling and Manufacturing, Changchun University of Science and Technology, Changchun 130022, China
*
Author to whom correspondence should be addressed.
Coatings 2018, 8(10), 360; https://doi.org/10.3390/coatings8100360
Received: 24 August 2018 / Revised: 1 October 2018 / Accepted: 4 October 2018 / Published: 9 October 2018
(This article belongs to the Special Issue Applications of Optical Thin Film Coatings)
Reflection loss on the optical component surface is detrimental to performance. Several researchers have discovered that the eyes of moths are covered with micro- and nanostructured films that reduce broadband and wide-angle light reflection. This research proposes a new type of moth-eye subwavelength structure with a waist, which is equivalent to a gradient refractive index film layer with high–low–high hyperbolic-type fill factor distribution. The diffraction order characteristics of a moth-eye subwavelength structure are first analyzed using a rigorous coupled wave analysis. The moth-eye structural parameters are optimized within the spectral range of 2–5 μm using the finite-difference time-domain method. The experimental fabrication of the moth-eye structure with a waist array upon a silicon substrate is demonstrated by using three-beam laser interferometric lithography and an inductively coupled plasma process. The experimental and simulation results show good agreement. The experimental results show that the reflectivity of the moth-eye structure with a waist is less than 1.3% when the incidence angle is less than 30°, and less than 4% when the incidence angle is less than 60°. This research can guide the development of AR broadband optical components and wide-angle applications. View Full-Text
Keywords: subwavelength structures; anti-reflection coatings; finite-difference time-domain; nanostructure fabrication subwavelength structures; anti-reflection coatings; finite-difference time-domain; nanostructure fabrication
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MDPI and ACS Style

Lin, H.; Ouyang, M.; Chen, B.; Zhu, Q.; Wu, J.; Lou, N.; Dong, L.; Wang, Z.; Fu, Y. Design and Fabrication of Moth-Eye Subwavelength Structure with a Waist on Silicon for Broadband and Wide-Angle Anti-Reflection Property. Coatings 2018, 8, 360.

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