Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition
Wang, B.; Fu, X.; Song, S.; Chu, H.O.; Gibson, D.; Li, C.; Shi, Y.; Wu, Z. Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition. Coatings 2018, 8, 325. https://doi.org/10.3390/coatings8090325
Wang B, Fu X, Song S, Chu HO, Gibson D, Li C, Shi Y, Wu Z. Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition. Coatings. 2018; 8(9):325. https://doi.org/10.3390/coatings8090325
Chicago/Turabian StyleWang, Ben, Xiuhua Fu, Shigeng Song, Hin On Chu, Desmond Gibson, Cheng Li, Yongjing Shi, and Zhentao Wu. 2018. "Simulation and Optimization of Film Thickness Uniformity in Physical Vapor Deposition" Coatings 8, no. 9: 325. https://doi.org/10.3390/coatings8090325