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Open AccessArticle

Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition

Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, Germany
Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Str. 7, 07745 Jena, Germany
Authors to whom correspondence should be addressed.
Coatings 2017, 7(8), 118;
Received: 12 June 2017 / Revised: 3 August 2017 / Accepted: 3 August 2017 / Published: 9 August 2017
(This article belongs to the Special Issue Antireflective Coatings for Glass and Transparent Polymers)
PDF [9288 KB, uploaded 9 August 2017]


Antireflection (AR) coatings are indispensable in numerous optical applications and are increasingly demanded on highly curved optical components. In this work, optical thin films of SiO2, Al2O3, TiO2 and Ta2O5 were prepared by atomic layer deposition (ALD), which is based on self-limiting surface reactions leading to a uniform film thickness on arbitrarily shaped surfaces. Al2O3/TiO2/SiO2 and Al2O3/Ta2O5/SiO2 AR coatings were successfully applied in the 400–750 nm and 400–700 nm spectral range, respectively. Less than 0.6% reflectance with an average of 0.3% has been measured on a fused silica hemispherical (half-ball) lens with 4 mm diameter along the entire lens surface at 0° angle of incidence. The reflectance on a large B270 aspherical lens with height of 25 mm and diameter of 50 mm decreased to less than 1% with an average reflectance < 0.3%. The results demonstrate that ALD is a promising technology for deposition of uniform optical layers on strongly curved lenses without complex in situ thickness monitoring. View Full-Text
Keywords: atomic layer deposition; optical coatings; antireflection; strongly curved surface atomic layer deposition; optical coatings; antireflection; strongly curved surface

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Pfeiffer, K.; Schulz, U.; Tünnermann, A.; Szeghalmi, A. Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition. Coatings 2017, 7, 118.

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