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Open AccessArticle

Numerical Verification of Gallium Nitride Thin-Film Growth in a Large MOCVD Reactor

Department of Mechanical Engineering, National Central University, Taoyuan 32001, Taiwan
Department of Chemical Engineering, Chung Yuan Christian University, Taoyuan 32023, Taiwan
Industrial Technology Research Institute, 195, Sec. 4, Chung Hsing Rd., Chutung, Hsinchu 31040, Taiwan
Author to whom correspondence should be addressed.
Coatings 2017, 7(8), 112;
Received: 20 June 2017 / Revised: 28 July 2017 / Accepted: 29 July 2017 / Published: 31 July 2017
(This article belongs to the Special Issue Chemical Vapor Deposition)
PDF [1927 KB, uploaded 2 August 2017]


A numerical verification procedure and the effects of operating conditions in a large, vertical, and close-spaced reactor for metalorganic chemical vapor deposition are investigated through simulation and analysis. A set of epitaxy experiments are presented for verifying the growth rate of the gallium nitride (GaN) mechanism reported in our previous study. The full governing equations for continuity, momentum, energy, and chemical reaction are solved numerically. The results show that the real operating parameters (susceptor temperature: 1188 °C or 1238 °C; pressure: 100–300 torr) affect thin-film uniformity, and the predicted growth rates agree reasonably well with the experimental data, indicating the accuracy of the projected chemical reaction mechanisms. View Full-Text
Keywords: MOCVD; mechanism; GaN; numerical verification; thin film; growth rate MOCVD; mechanism; GaN; numerical verification; thin film; growth rate

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Hu, C.-K.; Chen, C.-J.; Wei, T.-C.; Li, T.T.; Huang, C.-Y.; Chao, C.-L.; Lin, Y.-J. Numerical Verification of Gallium Nitride Thin-Film Growth in a Large MOCVD Reactor. Coatings 2017, 7, 112.

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