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Journal: Coatings, 2017
Volume: 7
Number: 23
23
Article: Silicides and Nitrides Formation in Ti Films Coated on Si and Exposed to (Ar-N₂-H₂) Expanding Plasma
Authors: by Isabelle Jauberteau, Richard Mayet, Julie Cornette, Denis Mangin, Annie Bessaudou, Pierre Carles, Jean Louis Jauberteau and Armand Passelergue
Link: https://www.mdpi.com/2079-6412/7/2/23

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