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Recent Developments in R.F. Magnetron Sputtered Thin Films for pH Sensing Applications—An Overview

Electron Science Research Institute, Edith Cowan University, Joondalup, WA 6027, Australia
Author to whom correspondence should be addressed.
Coatings 2014, 4(4), 756-771;
Received: 30 September 2014 / Revised: 21 November 2014 / Accepted: 24 November 2014 / Published: 1 December 2014
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pH sensors are widely used in chemical and biological applications. Metal oxides-based pH sensors have many attractive features including insolubility, stability, mechanical strength, electrocatalyst and manufacturing technology. Various metal oxide thin films prepared by radio frequency (R.F.) magnetron sputtering have attractive features, including high pH sensitivity, fast response, high resolution, good stability and reversibility as well as potential for measuring pH under conditions that are not favourable for the commonly used glass electrodes-based pH sensors. In addition, thin film pH sensors prepared by R.F. magnetron sputtering offer many advantages, such as ease of packaging, low cost through the use of standard microfabrication processes, miniaturisation, capability of measuring pH at high temperatures, ruggedness and disposability. In this paper, recent development of R.F. magnetron sputtered thin films for pH sensing applications are reviewed. View Full-Text
Keywords: R.F. magnetron sputtering; pH sensor; thin film; metal-oxides R.F. magnetron sputtering; pH sensor; thin film; metal-oxides

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Maurya, D.K.; Sardarinejad, A.; Alameh, K. Recent Developments in R.F. Magnetron Sputtered Thin Films for pH Sensing Applications—An Overview. Coatings 2014, 4, 756-771.

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