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Journal: Coatings, 2025
Volume: 15
Number: 563

Article: Understanding the Chamber Wall-Deposited Thin Film of Plasma Deposition Equipment for the Efficiency of In Situ Dry-Cleaning
Authors: by Jiseok Lee, Jiwon Jang and Sang Jeen Hong
Link: https://www.mdpi.com/2079-6412/15/5/563

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