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Journal: Coatings, 2025
Volume: 15
Number: 1481
1481
Article: Controlling the Scandium Gradient and Microstructure in AlN Thin Films via a Magnetron Sputtering-Ion Implantation Strategy
Authors: by Xiaolu Yuan, Xueyang Bai, Ke Huang, Junjun Wei, Liangxian Chen, Jinlong Liu, Chengming Li and Wenrui Wang
Link: https://www.mdpi.com/2079-6412/15/12/1481

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