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Journal: Coatings, 2025
Volume: 15
Number: 11
Article:
Multi-Step Simulations of Ionized Metal Physical Vapor Deposition to Enhance the Plasma Formation Uniformity
Authors:
by
Cheongbin Cheon, Min Young Hur, Ho Jun Kim and Hae June Lee
Link:
https://www.mdpi.com/2079-6412/15/1/11
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