Influence of Deposition Conditions and Thermal Treatments on Morphological and Chemical Characteristics of Li6.75La3Zr1.75Ta0.25O12 Thin Films Deposited by Nanosecond PLD
Abstract
:1. Introduction
2. Materials and Methods
3. Results and Discussion
3.1. PLD Films from Stoichiometric LLZTO Targets
3.2. PLD Films from Li2O-Enriched LLZTO Targets
3.3. Impact of the Post-PLD Annealing
3.4. Towards a Crystalline and Compact LLZTO Film via PLD
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Target Material | Deposition Pressure | Annealing Condition |
---|---|---|
LLZTO | 10−3 Pa | none |
10 Pa O2 | ||
LLZTO + Li2O | 10−3 Pa | none |
10 Pa O2 | ||
LLZTO + Li2O | 10−3 Pa | In air, heating 10 °C min−1, rest at 600 °C for 5 min, natural cooling |
10 Pa O2 | ||
LLZTO + Li2O | 10−3 Pa | Under O2 flow (80 mL min−1), heating 10 °C min−1, rest at 600 °C for 5 min, natural cooling |
10 Pa O2 |
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Curcio, M.; Brutti, S.; Celeste, A.; Galasso, A.; De Bonis, A.; Teghil, R. Influence of Deposition Conditions and Thermal Treatments on Morphological and Chemical Characteristics of Li6.75La3Zr1.75Ta0.25O12 Thin Films Deposited by Nanosecond PLD. Coatings 2023, 13, 1496. https://doi.org/10.3390/coatings13091496
Curcio M, Brutti S, Celeste A, Galasso A, De Bonis A, Teghil R. Influence of Deposition Conditions and Thermal Treatments on Morphological and Chemical Characteristics of Li6.75La3Zr1.75Ta0.25O12 Thin Films Deposited by Nanosecond PLD. Coatings. 2023; 13(9):1496. https://doi.org/10.3390/coatings13091496
Chicago/Turabian StyleCurcio, Mariangela, Sergio Brutti, Arcangelo Celeste, Agostino Galasso, Angela De Bonis, and Roberto Teghil. 2023. "Influence of Deposition Conditions and Thermal Treatments on Morphological and Chemical Characteristics of Li6.75La3Zr1.75Ta0.25O12 Thin Films Deposited by Nanosecond PLD" Coatings 13, no. 9: 1496. https://doi.org/10.3390/coatings13091496