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Journal: Coatings, 2023
Volume: 13
Number: 870

Article: Atomic Layer Deposition of La2O3 Film with Precursor La(thd)3-DMEA
Authors: by Wenyong Zhao, Jie Jiang, Yawen Luo, Jiahao Li and Yuqiang Ding
Link: https://www.mdpi.com/2079-6412/13/5/870

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