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Journal: Coatings, 2023
Volume: 13
Number: 387

Article: Fluorination of TiN, TiO2, and SiO2 Surfaces by HF toward Selective Atomic Layer Etching (ALE)
Authors: by Ju Hyeon Jung, Hongjun Oh and Bonggeun Shong
Link: https://www.mdpi.com/2079-6412/13/2/387

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