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Journal: Coatings, 2023
Volume: 13
Number: 278

Article: Heterostructure Films of SiO2 and HfO2 for High-Power Laser Optics Prepared by Plasma-Enhanced Atomic Layer Deposition
Authors: by Shawon Alam, Pallabi Paul, Vivek Beladiya, Paul Schmitt, Olaf Stenzel, Marcus Trost, Steffen Wilbrandt, Christian Mühlig, Sven Schröder, Gabor Matthäus, Stefan Nolte, Sebastian Riese, Felix Otto, Torsten Fritz, Alexander Gottwald and Adriana Szeghalmi
Link: https://www.mdpi.com/2079-6412/13/2/278

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