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Journal: Coatings, 2023
Volume: 13
Number: 2030
Article:
High-Rate Epitaxial Growth of Silicon Using Electron Beam Evaporation at High Temperatures
Authors:
by
Marit Stange, Tor Olav Sunde, Runar Dahl-Hansen, Kalpna Rajput, Joachim Seland Graff, Branson D. Belle and Alexander G. Ulyashin
Link:
https://www.mdpi.com/2079-6412/13/12/2030
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