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Journal: CoatingsVolume: 13Number: 2030
Article: High-Rate Epitaxial Growth of Silicon Using Electron Beam Evaporation at High Temperatures
  • Authors:
  • Marit Stange1,*,
  • Tor Olav Sunde1 and
  • Runar Dahl-Hansen2
  • et al.
Link: https://www.mdpi.com/2079-6412/13/12/2030

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