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Journal: Coatings, 2023
Volume: 13
Number: 1985

Article: Effect of Substrate Bias on the Microstructure and Properties of Non-Equimolar (AlCrSiTiZr)N Films with Different Cr/Zr Ratios Deposited Using Reactive Direct Current Magnetron Sputtering
Authors: by Hao-En Peng, Ching-Yin Lee, Hsin-Yi Chang and Jien-Wei Yeh
Link: https://www.mdpi.com/2079-6412/13/12/1985

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