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Journal: Coatings, 2023
Volume: 13
Number: 1672

Article: Effects of Bias Voltage and Substrate Temperature on the Mechanical Properties and Oxidation Behavior of CrWSiN Films
Authors: by Li-Chun Chang, Chin-Han Tzeng, Tzu-Yu Ou and Yung-I Chen
Link: https://www.mdpi.com/2079-6412/13/10/1672

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