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Journal: Coatings, 2022
Volume: 12
Number: 917
917
Article: Tantalum Suboxide Films with Tunable Composition and Electrical Resistivity Deposited by Reactive Magnetron Sputtering
Authors: by Alexander A. Baker, Alison M. Engwall, Leonardus Bimo Bayu-Aji, John H. Bae, Swanee J. Shin, John D. Moody and Sergei O. Kucheyev
Link: https://www.mdpi.com/2079-6412/12/7/917

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