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Journal: Coatings, 2021
Volume: 11
Number: 1133

Article: Effect of Nitrogen Flow Ratio on Degradation Behaviors and Failure of Magnetron Sputter Deposited Tantalum Nitride
Authors: by Zhigang Li, Yubao Zhang, Yi Wang, Jinfeng Li and Hongtao Zhao
Link: https://www.mdpi.com/2079-6412/11/9/1133

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