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Journal: Coatings, 2021
Volume: 11
Number: 173
Article:
Influence of Substrate Materials on Nucleation and Properties of Iridium Thin Films Grown by ALD
Authors:
by
Paul Schmitt, Vivek Beladiya, Nadja Felde, Pallabi Paul, Felix Otto, Torsten Fritz, Andreas Tünnermann and Adriana V. Szeghalmi
Link:
https://www.mdpi.com/2079-6412/11/2/173
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