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Review

Recent Studies on the Fabrication of Multilayer Films by Magnetron Sputtering and Their Irradiation Behaviors

1
School of Materials Science and Engineering, Harbin Institute of Technology, Shenzhen 518055, China
2
Institute of Special Environments Physical Sciences, Harbin Institute of Technology, Shenzhen 518055, China
*
Authors to whom correspondence should be addressed.
Coatings 2021, 11(12), 1468; https://doi.org/10.3390/coatings11121468
Received: 30 October 2021 / Revised: 21 November 2021 / Accepted: 22 November 2021 / Published: 29 November 2021
(This article belongs to the Special Issue Nanocomposite Thin Film and Multilayers)
Multilayer films with high-density layer interfaces have been studied widely because of the unique mechanical and functional properties. Magnetron sputtering is widely chosen to fabricate multilayer films because of the convenience in controlling the microstructure. Essentially, the properties of multilayer films are decided by the microstructure, which could be adjusted by manipulating the deposition parameters, such as deposition temperature, rate, bias, and target–substrate distance, during the sputter process. In this review, the influences of the deposition parameters on the microstructure evolution of the multilayer films have been summarized. Additionally, the impacts of individual layer thickness on the microstructure evolution as well as the irradiation behavior of various multilayer films have been discussed. View Full-Text
Keywords: multilayer films; magnetron sputtering; microstructure evolution; layer thickness; irradiation behaviors multilayer films; magnetron sputtering; microstructure evolution; layer thickness; irradiation behaviors
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MDPI and ACS Style

Ni, J.; Li, J.; Jian, J.; He, J.; Chen, H.; Leng, X.; Liu, X. Recent Studies on the Fabrication of Multilayer Films by Magnetron Sputtering and Their Irradiation Behaviors. Coatings 2021, 11, 1468. https://doi.org/10.3390/coatings11121468

AMA Style

Ni J, Li J, Jian J, He J, Chen H, Leng X, Liu X. Recent Studies on the Fabrication of Multilayer Films by Magnetron Sputtering and Their Irradiation Behaviors. Coatings. 2021; 11(12):1468. https://doi.org/10.3390/coatings11121468

Chicago/Turabian Style

Ni, Jinyang, Jin Li, Jie Jian, Jianchao He, Hongsheng Chen, Xuesong Leng, and Xiangli Liu. 2021. "Recent Studies on the Fabrication of Multilayer Films by Magnetron Sputtering and Their Irradiation Behaviors" Coatings 11, no. 12: 1468. https://doi.org/10.3390/coatings11121468

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