Deposition, Morphological, and Mechanical Evaluation of W and Be-Al2O3 and Er2O3 Co-Sputtered Films in Comparison with Pure Oxides
Abstract
:1. Introduction
2. Materials and Methods
2.1. Deposition Methods and Materials
2.2. Methods of Characterization
3. Results
3.1. Surface Topography Characterizations
3.2. Chemical State, Structure, and Thermal Desorption Measurements
3.3. Mechanical Characterization
4. Conclusions
- The resulted roughness determined by AFM measurements in Al2O3 metallic-oxides is increased to an extent that could favor gaseous trapping, while co-depositions with Be seem to promote an increased roughness and defects formation probability compared to W co-depositions.
- XPS characterized the co-deposited films as a mixture of oxidized and metallic states of the constituent elements. For the Al-based configurations, the Be presence determined the occurrence of metallic aluminum.
- Erbium oxide in both stable cubic phase and metastable monoclinic phase, respectively, were observed in pure and with W addition configurations; for pure Al2O3, a metastable κ-Al2O3 crystalline phase was observed, while the addition of W breaks the stability of κ-Al2O3, without significant influence on the structure;
- Modifications regarding the desorption mechanism were visible between oxide standards and oxide-metal configurations, while the desorption of O2 is mitigated and the bound of N2 peak is increased in the presence of W in the configuration;
- Lower elastic modulus on metal-oxide co-depositions was observed, while the indentation hardness increased for Be and decreased for W matrix configurations. Significantly better adhesion behavior was observed for pure configurations of oxides, while co-depositions were highly sensitive to premature delamination.
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
- Nougués, J.M.; Feliu, J.A.; Campanyà, G.; Iraola, E.; Batet, L.; Sedano, L. Advanced tools for ITER tritium plant system modeling and design. Fus. Sci. Technol. 2020, 76, 649–652. [Google Scholar] [CrossRef]
- Hassanein, A.; Sizyuk, V. Potential design problems for ITER Fus. device. Sci. Rep. 2021, 11, 1–11. [Google Scholar]
- Poitevin, Y.; Boccaccini, L.V.; Zmitko, M.; Ricapito, I.; Salavy, J.-F.; Diegele, E.; Gabriel, F.; Magnani, E.; Neuberger, H.; Lässer, R.; et al. Tritium breeder blankets design and technologies in Europe: Development status of ITER test blanket modules, test & qualification strategy and roadmap towards DEMO. Fus. Eng. Des. 2010, 85, 2340–2347. [Google Scholar]
- Nemanič, V. Hydrogen permeation barriers: Basic requirements, materials selection, deposition methods, and quality evaluation. Nuclear Mater. Energy 2019, 19, 451–457. [Google Scholar] [CrossRef]
- Rudomilova, D.; Prošek, T.; Salvetr, P.; Knaislova, A.; Novak, P.; Kodym, R.; Schimo-Aichhorn, G.; Muhr, A.; Duchaczek, H.; Luckeneder, G. The effect of microstructure on hydrogen permeability of high strength steels. Mater. Corrosion. 2020, 71, 909–917. [Google Scholar] [CrossRef]
- Wang, L.; Ye, X.; Feng, Y.; Luo, X.; Hong, Z.; Yan, J.; Gong, B.; Liao, H.; Wang, X.; Zhu, C.; et al. Hydrogen isotope permeability of reduced activation ferritic/martensitic steel CLF-1 corroded by Li4SiO4. Fus. Eng. Des. 2020, 153, 111490. [Google Scholar] [CrossRef]
- Itakura, A.N.; Miyauchi, N.; Murase, Y.; Yakebe, T.; Kitijima, M.; Aoyagi, S. Model of local hydrogen permeability in stainless steel with two coexisting structures. Sci. Rep. 2021, 11, 8553. [Google Scholar] [CrossRef] [PubMed]
- Tanabe, T. Selection of Plasma-Facing Materials. Plasma-Material Interactions in a Controlled Fusion Reactor; Springer: Singapore, 2021; pp. 187–197. [Google Scholar] [CrossRef]
- Kim, Y.; Lee, K.H.; Kim, E.-P.; Cheong, D.-I.; Hong, S.H. Fabrication of high temperature oxides dispersion strengthened tungsten composites by spark plasma sintering process. Int. J. Refract. Met. Hard Mater. 2009, 27, 842–846. [Google Scholar] [CrossRef]
- Xia, M.; Yan, Q.Z.; Xu, L.; Zhu, L.; Guo, H.; Ge, C. Synthesis of TiC/W core–shell nanoparticles by precipitate-coating process. J. Nucl. Mater. 2012, 430, 216–220. [Google Scholar] [CrossRef]
- Li, F.; Chen, C.; Guo, D.; Zhou, X.; Chen, Y.; Long, Y.; Guo, L.; Li, L.; Ren, Q.; Liao, Y.; et al. Rate theory and experimental study of the irradiation induced defects in molybdenum alloy. J. Alloys Compd. 2021, 874, 159751. [Google Scholar] [CrossRef]
- Hirai, T.; Pintsuk, G. Thermo-mechanical calculations on operation temperature limits of tungsten as plasma facing material. Fus. Eng. Des. 2007, 82, 389–393. [Google Scholar] [CrossRef]
- Zabihi, M.; Toroghinejad, M.R.; Shafyei, A. Application of powder metallurgy and hot rolling processes for manufacturing aluminum/alumina composite strips. Mater. Sci. Eng. A 2013, 560, 567–574. [Google Scholar] [CrossRef]
- Rajkovic, V.; Bozic, D.; Jovanovic, M.T. Effects of copper and Al2O3 particles on characteristics of Cu-Al2O3 composites. Mater. Des. 2010, 31, 1962–1970. [Google Scholar] [CrossRef]
- Seevakan, K.; Manikandan, A.; Devendran, P.; Slimani, Y.; Baykal, A.; Alagesan , T. Structural, magnetic and electrochemical characterizations of Bi2Mo2O9 nanoparticle for supercapacitor application. J. Magn. Magn. Mater. 2019, 486, 165254. [Google Scholar] [CrossRef]
- Slimani, Y.; Almessiere, M.A.; Shirsath, S.E.; Hannachi, E.; Yasin, G.; Baykal, A.; Ozccelik, B.; Ercan, I. Investigation of structural, morphological, optical, magnetic and dielectric properties of (1-x) BaTiO3/xSr0.92Ca0.04Mg0.04Fe12O19 composites. J. Magn. Magn. Mater. 2020, 510, 166933. [Google Scholar] [CrossRef]
- Hannachi, E.; Slimani, Y.; Alqwairi, F.; Almessiere, M.A.; Alqwairi, F. Comparative study of thermal fluctuation induced conductivity in YBa2Cu3O7-d containing Nano-Zn0.95Mn0.05O and Nano-Al2O3 particles. Sol. State Sci. 2020, 105, 106264. [Google Scholar] [CrossRef]
- Wang, C.; Zhang, L.; Wei, S.; Pan, K.; Wu, X.; Li, Q. Preparation, microstructure, and constitutive equation of W-0.25 wt% Al2O3 alloy. Mater. Sci. Eng. A 2019, 744, 79–85. [Google Scholar] [CrossRef]
- Katayama, K.; Ushida, H.; Matsuura, H.; Fukada, S.; Goto, M.; Nakagawa, S. Evaluation of tritium confinement performance of alumina and zirconium for tritium production in a high-temperature gas-cooled reactor for fusion reactors. Fus. Sci. Technol. 2015, 68, 662–668. [Google Scholar] [CrossRef]
- Blagoeva, D.; Opschoor, J.; Van der Laan, J.; Sârbu, C.; Pintsuk, G.; Jong, M.; Bakker, T.; Ten Pierick, P.; Nolles, H. Development of tungsten and tungsten alloys for DEMO divertor applications via MIM technology. J. Nucl. Mater. 2013, 442, S198–S203. [Google Scholar] [CrossRef]
- Fave, L.; Pouchon, M.A.; Döbeli, M.; Schulte-Borchers, M.; Kimura, A. Helium ion irradiation induced swelling and hardening in commercial and experimental ODS steels. J. Nucl. Mater. 2014, 445, 235–240. [Google Scholar] [CrossRef]
- Brimbal, D.; Miro, S.; de Castro, V.; Poissonnet, S.; Trocellier, P.; Serruys, Y.; Beck, L. Application of raman spectroscopy to the study of hydrogen in an ion irradiated oxide-dispersion strengthened Fe–12Cr steel. J. Nucl. Mater. 2014, 447, 179–182. [Google Scholar] [CrossRef]
- Chen, J.; Jung, P.; Henry, J.; de Carlan, Y.; Sauvage, T.; Duval, F.; Barthe, M.; Hoffelner, W. Irradiation creep and microstructural changes of ods steels of different cr-contents during helium implantation under stress. J. Nucl. Mater. 2013, 437, 432–437. [Google Scholar] [CrossRef]
- Huang, Z.; Harris, A.; Maloy, S.A.; Hosemann, P. Nanoindentation creep study on an ion beam irradiated oxide dispersion strengthened alloy. J. Nucl. Mater. 2014, 451, 162–167. [Google Scholar] [CrossRef]
- Lazauskas, T.; Kenny, S.D.; Smith, R.; Nagra, G.; Dholakia, M.; Valsakumar, M. Simulating radiation damage in a bcc Fe system with embedded yttria nanoparticles. J. Nucl. Mater. 2013, 437, 317–325. [Google Scholar] [CrossRef] [Green Version]
- Liu, R.; Xie, Z.; Fang, Q.; Zhang, T.; Wang, X.; Hao, T.; Liu, C.; Dai, Y. Nanostructured yttria dispersion-strengthened tungsten synthesized by sol–gel method. J. Alloys Compd. 2016, 657, 73–80. [Google Scholar] [CrossRef]
- Odette, G.; Alinger, M.; Wirth, B. Recent developments in irradiation-resistant steels. Annu. Rev. Mater. Res. 2008, 38, 471–503. [Google Scholar] [CrossRef]
- Zhang, G.; Wang, X.; Xiong, Y.; Shi, Y.; Song, J.; Luo, D. Mechanism for adsorption, dissociation and difusion of hydrogen in hydrogen permeation barrier of α-Al2O3: A density functional theory study. Int. J. Hydrogen Energy 2013, 38, 1157–1165. [Google Scholar] [CrossRef]
- Li, Q.; Wang, J.; Xiang, Q.-Y.; Yan, K.; Yao, W.-Q.; Cao, J.-L. Study on influence factors of permeation reduction factor of Al2O3-hydrogen isotopes permeation barriers. Int. J. Hydrogen Energy 2016, 41, 4326–4331. [Google Scholar] [CrossRef]
- Yanan, S.; Xiang, H.; Dai, F.-Z.; Wang, X.; Yan, X.; Zhou, Y. Preparation and properties of CMAS resistant bixbyite structured high-entropy oxides RE2O3 (RE = Sm, Eu, Er, Lu, Y, and Yb): Promising environmental barrier coating materials for Al2O3f/Al2O3 composites. J. Adv. Ceram. 2021, 10, 596–613. [Google Scholar] [CrossRef]
- Mohammadtaheri, M.; Yang, Q.; Li, Y.; Corona-Gomez, J. The effect of deposition parameters on the structure and mechanical properties of chromium oxide coatings deposited by reactive magnetron sputtering. Coatings 2018, 8, 111. [Google Scholar] [CrossRef] [Green Version]
- Prashant Singh, P.; Kumar Jha, R.; Kumar Singh, R.; Singh, B.R. Preparation and characterization of Al2O3 film deposited by RF sputtering and plasma enhanced atomic layer deposition. J. Vacuum Sci. Technol. B 2018, 36, 04G101. [Google Scholar] [CrossRef]
- Huang, Y.; Chen, L.; Jia, X.; Shao, M.; Shao, S.; Zhu, X.; An, K.; Liu, J.; Wei, J.; Li, C. Microstructure, hardness and optical properties of Er2O3 films deposited on diamond-coated and Si(100) substrates by radio frequency magnetron sputtering. Thin Sol. Films 2020, 709, 138131. [Google Scholar] [CrossRef]
- Xu, H.; Alfrod, C.; Chason, E.; Detor, A.J.; Fuller, T.; Hamza, A.V.; Hayes, J.; Moreno, K.A.; Nikroo, A.; van Buuren, T.; et al. Thick beryllium coatings by ion-assisted magnetron sputtering. J. Mater. Res. 2012, 27, 22–828. [Google Scholar] [CrossRef]
- Bouziane, K.; Mamor, M.; Meyer, F. DC magnetron sputtered tungsten: W film properties and electrical properties of W/Si Schottky diodes. Appl. Phys. A 2005, 81, 209–215. [Google Scholar] [CrossRef]
- Nemanič, V.; KovačJozef, J.; Lungu, C.; Porosnicu, C.; Zajec, B. Characterization of tungsten films and their hydrogen permeability. J. Vacuum Sci. Technol. 2014, A32, 061511. [Google Scholar] [CrossRef]
- Velicu, I.-L.; Ianoş, G.-T.; Porosnicu, C.; Mihăilă, I.; Burducea, I.; Velea, A.; Cristea, D.; Munteanu, D.; Tiron, V. Energy-enhanced deposition of copper thin films by bipolar high power impulse magnetron sputtering. Surf. Coat. Technol. 2019, 359, 97–107. [Google Scholar] [CrossRef]
- Oliver, W.C.; Pharr, G.M. Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology. J. Mater. Res. 2004, 19, 3–20. [Google Scholar] [CrossRef]
- Zhou, G.; Wang, L.; Wang, X.; Yu, Y.; Mutzke, A. Effect of bias voltage on microstructure and optical properties of Al2O3 thin films prepared by twin targets reactive high power impulse magnetron sputtering. Vacuum 2019, 166, 88–96. [Google Scholar] [CrossRef]
- Naveen, A.; Krishnamurthy, L.; Shridhar, T.N. Thickness and surface roughness study of co-sputtered nanostructured alumina/tungsten (Al2O3/W) thin films. AIP Conf. Proc. 2018, 1943, 020083. [Google Scholar]
- Engelhart, W.; Dreher, W.; Eibl, O.; Schier, V. Deposition of alumina thin film by dual magnetron sputtering: Is it γ-Al2O3? Acta Mater. 2011, 59, 7757–7767. [Google Scholar] [CrossRef]
- Moulder, F.; Stickle, W.F.; Sobol, P.E.; Bomben, K.D. Handbook of x-ray photoelectron spectroscopy. Phys. Electron. 1995, 230–232. [Google Scholar]
- NIST X-ray Photoelectron Spectroscopy Database, NIST Standard Reference Database Number 20; National Institute of Standards and Technology: Gaithersburg, MD, USA, 2000; p. 20899. [CrossRef]
- Armelao, L. Silica-Supported Erbium-based Nanosystems: An XPS Characterization. Surf. Sci. Spectra 2004, 11, 26–32. [Google Scholar] [CrossRef]
- Armelao, L.; Barreca, D.; Bottaro, G. ZnO:Er(III) Nanosystems Analyzed by XPS. Surf. Sci. Spectra 2006, 13, 9–16. [Google Scholar] [CrossRef]
- Adelhelm, C.; Pickert, T.; Balden, M.; Rasinski, M.; Plocinski, T.; Ziebert, C.; Koch, F.; Maier, H. Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition. Scripta Mater. 2009, 61, 789–792. [Google Scholar] [CrossRef] [Green Version]
- Yan, D.; Wu, P.; Zhang, S.P.; Liang, L.; Yang, F.; Pei, Y.L.; Chen, S. Assignments of the Raman modes of monoclinic erbium oxide. J. Appl. Phys. 2013, 114, 193502. [Google Scholar] [CrossRef]
- Hochauer, D.; Mittere, C.; Penoy, M.; Michotte, C.; Martinz, H.P.; Kathrein, M. Thermal stability of doped CVD κ-Al2O3 coatings. Surf. Coat. Technol. 2010, 204, 3713–3722. [Google Scholar] [CrossRef]
- Zhang, L.; Jiang, H.C.; Liu, C.; Dong, J.W.; Chow, P. Annealing of Al2O3 thin films prepared by atomic layer deposition. J. Phys. D Appl. Phys. 2007, 40, 3707. [Google Scholar] [CrossRef]
- Söderlund, E.; Reineck, I.; Rowcliffe, D. Ultralow load indentation hardness and modulus of K—and α–Al2O3 CVD coatings. J. Mater. Res. 1994, 9, 1683–1692. [Google Scholar] [CrossRef]
- Ruppi, S.; Larsson, A.; Flink, A. Nanoindentation hardness, texture and microstructure of α-Al2O3 and κ-Al2O3 coatings. Thin Sol. Films 2008, 516, 5959–5966. [Google Scholar] [CrossRef]
- Tiron, V.; Porosnicu, C.; Dinca, P.; Velicu, I.-L.; Cristea, D.; Munteanu, D.; Revesz, A.; Stoian, G.; Lungu, C.P. Beryllium thin films deposited by thermionic vacuum arc for nuclear applications. Appl. Surf. Sci. 2019, 481, 327–336. [Google Scholar] [CrossRef]
- Broitman, E. Indentation hardness measurements at macro-, micro-, and nanoscale: A critical overview. Tribol. Lett. 2017, 65, 23. [Google Scholar] [CrossRef] [Green Version]
Sample Code Name | Configuration | RF [W] | DC | Pressure [10−3 mbar] | Deposition Rate × 10−1 [n/s] | |
---|---|---|---|---|---|---|
[kV] | [A] | |||||
S1 | Er2O3 | 100 | - | - | 1.5 | 0.6 |
S2 | Er2O3:W | 100 | 0.32 | 0.04 | 40 | 0.8 (0.6:0.2) |
S3 | Er2O3:Be | 60 | 0.32 | 0.04 | 10 | 3.4 (0.6:2.8) |
S4 | Al2O3 | 100 | - | - | 3 | 0.14 |
S5 | Al2O3:W | 100 | 0.32 | 0.02 | 4 | 0.16 (0.14:0.028) |
S6 | Al2O3:Be | 100 | 0.42 | 0.15 | 4 | 0.44 (0.14:0.3) |
Sample | Er | Al | O | W | Be |
---|---|---|---|---|---|
S1 | 84.88/34.93 | - | 15.12/65.07 | - | - |
S2 | 53.11/37.73 | - | 4.69/34.88 | 42.31/27.41 | - |
S3 | 82.15/30.56 | 17.85/69.44 | Not detectable | ||
S4 | - | 42.83/30.76 | 57.17/69.24 | - | - |
S5 | - | 18.06/25.49 | 26.49/63.03 | 55.45/11.48 | - |
S6 | - | 46.29/33.83 | 53.71/66.17 | - | Not detectable |
Sample | O1s | Al2p | W4f | Be1s | Er4d |
---|---|---|---|---|---|
S1 | 60.8 | - | - | - | 39.2 |
S2 | 62.8 | - | 2.5 | - | 34.7 |
S3 | 58.9 | - | - | 24.6 | 16.5 |
S4 | 83.5 | 16.5 | - | - | - |
S5 | 79.2 | 13.4 | 7.4 | - | - |
S6 | 64.2 | 7.9 | - | 27.9 | - |
Publisher’s Note: MDPI stays neutral with regard to jurisdictional claims in published maps and institutional affiliations. |
© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
Share and Cite
Lungu, M.; Staicu, C.; Baiasu, F.; Marin, A.; Butoi, B.; Cristea, D.; Pompilian, O.G.; Locovei, C.; Porosnicu, C. Deposition, Morphological, and Mechanical Evaluation of W and Be-Al2O3 and Er2O3 Co-Sputtered Films in Comparison with Pure Oxides. Coatings 2021, 11, 1430. https://doi.org/10.3390/coatings11111430
Lungu M, Staicu C, Baiasu F, Marin A, Butoi B, Cristea D, Pompilian OG, Locovei C, Porosnicu C. Deposition, Morphological, and Mechanical Evaluation of W and Be-Al2O3 and Er2O3 Co-Sputtered Films in Comparison with Pure Oxides. Coatings. 2021; 11(11):1430. https://doi.org/10.3390/coatings11111430
Chicago/Turabian StyleLungu, Mihail, Cornel Staicu, Flaviu Baiasu, Alexandru Marin, Bogdan Butoi, Daniel Cristea, Oana Gloria Pompilian, Claudiu Locovei, and Corneliu Porosnicu. 2021. "Deposition, Morphological, and Mechanical Evaluation of W and Be-Al2O3 and Er2O3 Co-Sputtered Films in Comparison with Pure Oxides" Coatings 11, no. 11: 1430. https://doi.org/10.3390/coatings11111430