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Journal: Coatings, 2021
Volume: 11
Number: 1352
1352
Article: Investigating the Nucleation of AlO_x and HfO_x ALD on Polyimide: Influence of Plasma Activation
Authors: by Laura Astoreca, David Schaubroeck, Parinaz Saadat Esbah Tabaei, Rouba Ghobeira, Maaike Op de Beeck, Rino Morent, Herbert De Smet and Nathalie De Geyter
Link: https://www.mdpi.com/2079-6412/11/11/1352

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