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Journal: Coatings, 2021
Volume: 11
Number: 54
54
Article: Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiN_x Thin Films
Authors: by Nikolett Hegedüs, Riku Lovics, Miklós Serényi, Zsolt Zolnai, Péter Petrik, Judit Mihály, Zsolt Fogarassy, Csaba Balázsi and Katalin Balázsi
Link: https://www.mdpi.com/2079-6412/11/1/54

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