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Journal: Coatings, 2020
Volume: 10
Number: 357
Article:
Theoretical and Experimental Study of Particle Distribution from Magnetron Sputtering with Masks for Accurate Thickness Profile Control
Authors:
by
Yingna Shi, Qiushi Huang, Runze Qi, Zhengxiang Shen, Zhong Zhang and Zhanshan Wang
Link:
https://www.mdpi.com/2079-6412/10/4/357
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