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Open AccessArticle

Multilayer Nanoimprinting to Create Hierarchical Stamp Masters for Nanoimprinting of Optical Micro- and Nanostructures

PROFACTOR GmbH, Im Stadtgut A2, 4407 Steyr-Gleink, Austria
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Coatings 2020, 10(3), 301; https://doi.org/10.3390/coatings10030301
Received: 28 February 2020 / Revised: 13 March 2020 / Accepted: 17 March 2020 / Published: 24 March 2020
Nanoimprinting is a well-established replication technology for optical elements, with the capability to replicate highly complex micro- and nanostructures. One of the main challenges, however, is the generation of the master structures necessary for stamp fabrication. We used UV-based Nanoimprint Lithography to prepare hierarchical master structures. To realize structures with two different length scales, conventional nanoimprinting of larger structures and conformal reversal nanoimprinting to print smaller structures on top of the larger structures was performed. Liquid transfer imprint lithography proved to be well suited for this purpose. We used the sample prepared in such a way as a master for further nanoimprinting, where the hierarchical structures can then be imprinted in one single nanoimprinting step. As an example, we presented a diffusor structure with a diffraction-grating structure on top. View Full-Text
Keywords: Nanoimprint lithography; UV-NIL; reversal NIL; liquid transfer imprint lithography; hierarchical structures; optical micro- and nanostructures Nanoimprint lithography; UV-NIL; reversal NIL; liquid transfer imprint lithography; hierarchical structures; optical micro- and nanostructures
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MDPI and ACS Style

Moharana, A.R.; Außerhuber, H.M.; Mitteramskogler, T.; Haslinger, M.J.; Mühlberger, M.M. Multilayer Nanoimprinting to Create Hierarchical Stamp Masters for Nanoimprinting of Optical Micro- and Nanostructures. Coatings 2020, 10, 301.

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