Galizia, B.; Schilirò, E.; Fiorenza, P.; Giannazzo, F.; Pecz, B.; Fogarassy, Z.; Roccaforte, F.; Lo Nigro, R.
Insights into ALD Growth of Al-Based Dielectric Stack on 4H-SiC. Nanomaterials 2026, 16, 782.
https://doi.org/10.3390/nano16120782
AMA Style
Galizia B, Schilirò E, Fiorenza P, Giannazzo F, Pecz B, Fogarassy Z, Roccaforte F, Lo Nigro R.
Insights into ALD Growth of Al-Based Dielectric Stack on 4H-SiC. Nanomaterials. 2026; 16(12):782.
https://doi.org/10.3390/nano16120782
Chicago/Turabian Style
Galizia, Bruno, Emanuela Schilirò, Patrick Fiorenza, Filippo Giannazzo, Bela Pecz, Zsolt Fogarassy, Fabrizio Roccaforte, and Raffaella Lo Nigro.
2026. "Insights into ALD Growth of Al-Based Dielectric Stack on 4H-SiC" Nanomaterials 16, no. 12: 782.
https://doi.org/10.3390/nano16120782
APA Style
Galizia, B., Schilirò, E., Fiorenza, P., Giannazzo, F., Pecz, B., Fogarassy, Z., Roccaforte, F., & Lo Nigro, R.
(2026). Insights into ALD Growth of Al-Based Dielectric Stack on 4H-SiC. Nanomaterials, 16(12), 782.
https://doi.org/10.3390/nano16120782