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Journal: NanomaterialsVolume: 15Number: 499
Article: Effect of Rapid Thermal Annealing on the Characteristics of Micro Zn-Doped Ga2O3 Films by Using Mixed Atomic Layer Deposition
- Authors:
- Jiajia Tao1,2,3,
- Xishun Jiang4,* and
- Aijie Fan2
- et al.
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