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Journal: Nanomaterials, 2025
Volume: 15
Number: 958
Article:
Physical and Electrical Properties of Silicon Nitride Thin Films with Different Nitrogen–Oxygen Ratios
Authors:
by
Wen-Jie Chen, Yang-Chao Liu, Zhen-Yu Wang, Lin Gu, Yi Shen and Hong-Ping Ma
Link:
https://www.mdpi.com/2079-4991/15/13/958
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