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Journal: Nanomaterials, 2023
Volume: 13
Number: 731
731
Article: H₂ Plasma and PMA Effects on PEALD-Al₂O₃ Films with Different O₂ Plasma Exposure Times for CIS Passivation Layers
Authors: by Jehyun An, Kyeongkeun Choi, Jongseo Park, Bohyeon Kang, Hyunseo You, Sungmin Ahn and Rockhyun Baek
Link: https://www.mdpi.com/2079-4991/13/4/731

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