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Journal: Nanomaterials, 2022
Volume: 12
Number: 3937
3937
Article: Study of Defects and Nano-patterned Substrate Regulation Mechanism in AlN Epilayers
Authors: by Wenwang Wei, Yi Peng, Yanlian Yang, Kai Xiao, Mudassar Maraj, Jia Yang, Yukun Wang and Wenhong Sun
Link: https://www.mdpi.com/2079-4991/12/22/3937

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