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Journal: Nanomaterials, 2022
Volume: 12
Number: 3890
3890
Article: Crystallinity Effect on Electrical Properties of PEALD–HfO₂ Thin Films Prepared by Different Substrate Temperatures
Authors: by Xiao-Ying Zhang, Jing Han, Duan-Chen Peng, Yu-Jiao Ruan, Wan-Yu Wu, Dong-Sing Wuu, Chien-Jung Huang, Shui-Yang Lien and Wen-Zhang Zhu
Link: https://www.mdpi.com/2079-4991/12/21/3890

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