Zhang, X.-Y.; Han, J.; Peng, D.-C.; Ruan, Y.-J.; Wu, W.-Y.; Wuu, D.-S.; Huang, C.-J.; Lien, S.-Y.; Zhu, W.-Z.
Crystallinity Effect on Electrical Properties of PEALD–HfO2 Thin Films Prepared by Different Substrate Temperatures. Nanomaterials 2022, 12, 3890.
https://doi.org/10.3390/nano12213890
AMA Style
Zhang X-Y, Han J, Peng D-C, Ruan Y-J, Wu W-Y, Wuu D-S, Huang C-J, Lien S-Y, Zhu W-Z.
Crystallinity Effect on Electrical Properties of PEALD–HfO2 Thin Films Prepared by Different Substrate Temperatures. Nanomaterials. 2022; 12(21):3890.
https://doi.org/10.3390/nano12213890
Chicago/Turabian Style
Zhang, Xiao-Ying, Jing Han, Duan-Chen Peng, Yu-Jiao Ruan, Wan-Yu Wu, Dong-Sing Wuu, Chien-Jung Huang, Shui-Yang Lien, and Wen-Zhang Zhu.
2022. "Crystallinity Effect on Electrical Properties of PEALD–HfO2 Thin Films Prepared by Different Substrate Temperatures" Nanomaterials 12, no. 21: 3890.
https://doi.org/10.3390/nano12213890
APA Style
Zhang, X.-Y., Han, J., Peng, D.-C., Ruan, Y.-J., Wu, W.-Y., Wuu, D.-S., Huang, C.-J., Lien, S.-Y., & Zhu, W.-Z.
(2022). Crystallinity Effect on Electrical Properties of PEALD–HfO2 Thin Films Prepared by Different Substrate Temperatures. Nanomaterials, 12(21), 3890.
https://doi.org/10.3390/nano12213890