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Volume 12
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10.3390/nano12172913
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Article

NaCl-Assisted Chemical Vapor Deposition of Large-Domain Bilayer MoS2 on Soda-Lime Glass

by
Qingguo Gao
1,*,
Lvcheng Chen
1,
Simin Chen
1,
Zhi Zhang
1,
Jianjun Yang
1,
Xinjian Pan
1,
Zichuan Yi
1,
Liming Liu
1,
Feng Chi
1,
Ping Liu
1 and
Chongfu Zhang
1,2
1
School of Electronic Information, University of Electronic Science and Technology of China, Zhongshan Institute, Zhongshan 528402, China
2
School of Information and Communication Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
*
Author to whom correspondence should be addressed.
Nanomaterials 2022, 12(17), 2913; https://doi.org/10.3390/nano12172913
Submission received: 6 August 2022 / Revised: 19 August 2022 / Accepted: 20 August 2022 / Published: 24 August 2022
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Abstract

In recent years, two-dimensional molybdenum disulfide (MoS2) has attracted extensive attention in the application field of next-generation electronics. Compared with single-layer MoS2, bilayer MoS2 has higher carrier mobility and has more promising applications for future novel electronic devices. Nevertheless, the large-scale low-cost synthesis of high-quality bilayer MoS2 still has much room for exploration, requiring further research. In this study, bilayer MoS2 crystals grown on soda-lime glass substrate by sodium chloride (NaCl)-assisted chemical vapor deposition (CVD) were reported, the growth mechanism of NaCl in CVD of bilayer MoS2 was analyzed, and the effects of molybdenum trioxide (Mo) mass and growth pressure on the growth of bilayer MoS2 under the assistance of NaCl were further explored. Through characterization with an optical microscope, atomic force microscopy and Raman analyzer, the domain size of bilayer MoS2 prepared by NaCl-assisted CVD was shown to reach 214 μm, which is a 4.2X improvement of the domain size of bilayer MoS2 prepared without NaCl-assisted CVD. Moreover, the bilayer structure accounted for about 85%, which is a 2.1X improvement of bilayer MoS2 prepared without NaCl-assisted CVD. This study provides a meaningful method for the growth of high-quality bilayer MoS2, and promotes the large-scale and low-cost applications of CVD MoS2.
Keywords: bilayer MoS2; chemical vapor deposition; NaCl; glass bilayer MoS2; chemical vapor deposition; NaCl; glass

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MDPI and ACS Style

Gao, Q.; Chen, L.; Chen, S.; Zhang, Z.; Yang, J.; Pan, X.; Yi, Z.; Liu, L.; Chi, F.; Liu, P.; et al. NaCl-Assisted Chemical Vapor Deposition of Large-Domain Bilayer MoS2 on Soda-Lime Glass. Nanomaterials 2022, 12, 2913. https://doi.org/10.3390/nano12172913

AMA Style

Gao Q, Chen L, Chen S, Zhang Z, Yang J, Pan X, Yi Z, Liu L, Chi F, Liu P, et al. NaCl-Assisted Chemical Vapor Deposition of Large-Domain Bilayer MoS2 on Soda-Lime Glass. Nanomaterials. 2022; 12(17):2913. https://doi.org/10.3390/nano12172913

Chicago/Turabian Style

Gao, Qingguo, Lvcheng Chen, Simin Chen, Zhi Zhang, Jianjun Yang, Xinjian Pan, Zichuan Yi, Liming Liu, Feng Chi, Ping Liu, and et al. 2022. "NaCl-Assisted Chemical Vapor Deposition of Large-Domain Bilayer MoS2 on Soda-Lime Glass" Nanomaterials 12, no. 17: 2913. https://doi.org/10.3390/nano12172913

APA Style

Gao, Q., Chen, L., Chen, S., Zhang, Z., Yang, J., Pan, X., Yi, Z., Liu, L., Chi, F., Liu, P., & Zhang, C. (2022). NaCl-Assisted Chemical Vapor Deposition of Large-Domain Bilayer MoS2 on Soda-Lime Glass. Nanomaterials, 12(17), 2913. https://doi.org/10.3390/nano12172913

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