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Article

Titanium Nitride as a New Prospective Material for NanoSQUIDs and Superconducting Nanobridge Electronics

1
Peter Grünberg Institute 5, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany
2
Faculty of Georesources and Materials Engineering, RWTH Aachen University, 52062 Aachen, Germany
3
Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Forschungszentrum Jülich GmbH, 52425 Jülich, Germany
*
Author to whom correspondence should be addressed.
Academic Editor: Jeong Ryeol Choi
Nanomaterials 2021, 11(2), 466; https://doi.org/10.3390/nano11020466
Received: 20 January 2021 / Revised: 7 February 2021 / Accepted: 9 February 2021 / Published: 12 February 2021
Nanobridge Josephson junctions and nanometer-scale superconducting quantum interference devices (nanoSQUIDs) based on titanium nitride (TiN) thin films are described. The TiN films have a room temperature resistivity of ~15 µΩ·cm, a superconducting transition temperature Tc of up to 5.3 K and a coherence length ξ(4.2 K) of ~105 nm. They were deposited using pulsed DC magnetron sputtering from a stoichiometric TiN target onto Si (100) substrates that were heated to 800 °C. Electron beam lithography and highly selective reactive ion etching were used to fabricate nanoSQUIDs with 20-nm-wide nanobridge Josephson junctions of variable thickness. X-ray and high-resolution electron microscopy studies were performed. Non-hysteretic I(V) characteristics of the nanobridges and nanoSQUIDs, as well as peak-to-peak modulations of up to 17 µV in the V(B) characteristics of the nanoSQUIDs, were measured at 4.2 K. The technology offers prospects for superconducting electronics based on nanobridge Josephson junctions operating within the framework of the Ginzburg–Landau theory at 4.2 K. View Full-Text
Keywords: titanium nitride; nanobridge Josephson junction; nanoSQUID; superconducting electronics titanium nitride; nanobridge Josephson junction; nanoSQUID; superconducting electronics
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MDPI and ACS Style

Faley, M.I.; Liu, Y.; Dunin-Borkowski, R.E. Titanium Nitride as a New Prospective Material for NanoSQUIDs and Superconducting Nanobridge Electronics. Nanomaterials 2021, 11, 466. https://doi.org/10.3390/nano11020466

AMA Style

Faley MI, Liu Y, Dunin-Borkowski RE. Titanium Nitride as a New Prospective Material for NanoSQUIDs and Superconducting Nanobridge Electronics. Nanomaterials. 2021; 11(2):466. https://doi.org/10.3390/nano11020466

Chicago/Turabian Style

Faley, Michael I., Yuchen Liu, and Rafal E. Dunin-Borkowski. 2021. "Titanium Nitride as a New Prospective Material for NanoSQUIDs and Superconducting Nanobridge Electronics" Nanomaterials 11, no. 2: 466. https://doi.org/10.3390/nano11020466

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