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Journal: Nanomaterials, 2020
Volume: 10
Number: 2214
Article:
On the Formation of Black Silicon Features by Plasma-Less Etching of Silicon in Molecular Fluorine Gas
Authors:
by
Bishal Kafle, Ahmed Ismail Ridoy, Eleni Miethig, Laurent Clochard, Edward Duffy, Marc Hofmann and Jochen Rentsch
Link:
https://www.mdpi.com/2079-4991/10/11/2214
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