Kim, H.-S.; Lee, D.-H.; Hyun, S.; Je, S.K.; Park, J.G.; Bae, J.Y.; Kim, G.H.; Kim, I.J.
Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces. Appl. Sci. 2019, 9, 5205.
https://doi.org/10.3390/app9235205
AMA Style
Kim H-S, Lee D-H, Hyun S, Je SK, Park JG, Bae JY, Kim GH, Kim IJ.
Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces. Applied Sciences. 2019; 9(23):5205.
https://doi.org/10.3390/app9235205
Chicago/Turabian Style
Kim, Hong-Seung, Dong-Ho Lee, Sangwon Hyun, Soon Kyu Je, June Gyu Park, Ji Yong Bae, Geon Hee Kim, and I Jong Kim.
2019. "Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces" Applied Sciences 9, no. 23: 5205.
https://doi.org/10.3390/app9235205
APA Style
Kim, H.-S., Lee, D.-H., Hyun, S., Je, S. K., Park, J. G., Bae, J. Y., Kim, G. H., & Kim, I. J.
(2019). Development of a Reflective 193-nm DUV Microscope System for Defect Inspection of Large Optical Surfaces. Applied Sciences, 9(23), 5205.
https://doi.org/10.3390/app9235205