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Appl. Sci. 2019, 9(2), 255; https://doi.org/10.3390/app9020255

A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications

1
Université Grenoble Alpes, CEA, LETI, F38000 Grenoble, France
2
Institut des Nanotechnologies de Lyon, UMR CNRS 5270, Ecole Centrale Lyon, F-69130 Ecully, France
3
2DTU Fotonik, Technical University of Denmark, Kgs. DK-2800 Lyngby, Denmark
*
Authors to whom correspondence should be addressed.
Received: 30 November 2018 / Revised: 24 December 2018 / Accepted: 29 December 2018 / Published: 11 January 2019
(This article belongs to the Special Issue Silicon Photonics – Emerging Devices and Applications)
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Abstract

Silicon photonics is one of the most prominent technology platforms for integrated photonics and can support a wide variety of applications. As we move towards a mature industrial core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities of our silicon photonics platform. Depending on the application being targeted, we have developed several integration strategies for the incorporation of SiN. We present these processes, as well as key components for dedicated applications. In particular, we present the use of SiN for athermal multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology applications and the use of SiN to realize optical phased arrays in the 800–1000 nm wavelength range for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the versatility and scalability of the Si-SiN platform. View Full-Text
Keywords: silicon photonics; silicon nitride; transceiver; multiplexing; grating coupler; Coarse Wavelength Division Multiplexing (CWDM); LIDAR; optical phased array; beam steering; frequency comb; Kerr nonlinearity silicon photonics; silicon nitride; transceiver; multiplexing; grating coupler; Coarse Wavelength Division Multiplexing (CWDM); LIDAR; optical phased array; beam steering; frequency comb; Kerr nonlinearity
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Wilmart, Q.; El Dirani, H.; Tyler, N.; Fowler, D.; Malhouitre, S.; Garcia, S.; Casale, M.; Kerdiles, S.; Hassan, K.; Monat, C.; Letartre, X.; Kamel, A.; Pu, M.; Yvind, K.; Oxenløwe, L.K.; Rabaud, W.; Sciancalepore, C.; Szelag, B.; Olivier, S. A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications. Appl. Sci. 2019, 9, 255.

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