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Open AccessArticle

Refractive Index Variation of Magnetron-Sputtered a-Si1−xGex by “One-Sample Concept” Combinatory

Institute for Technical Physics and Materials Science, Centre for Energy Research, Hungarian Academy of Sciences, Konkoly-Thege Rd. 29-33, 1121 Budapest, Hungary
Author to whom correspondence should be addressed.
Appl. Sci. 2018, 8(5), 826;
Received: 12 April 2018 / Revised: 6 May 2018 / Accepted: 10 May 2018 / Published: 21 May 2018
(This article belongs to the Special Issue Photonic Metamaterials)
Gradient a-Si1−xGex layers have been deposited by ”one-sample concept” combinatorial direct current (DC) magnetron sputtering onto one-inch-long Si slabs. Characterizations by electron microscopy, ion beam analysis and ellipsometry show that the layers are amorphous with a uniform thickness, small roughness and compositions from x = 0 to x = 1 changing linearly with the lateral position. By focused-beam mapping ellipsometry, we show that the optical constants also vary linearly with the lateral position, implying that the optical constants are linear functions of the composition. Both the refractive index and the extinction coefficient can be varied in a broad range for a large spectral region. The precise control and the knowledge of layer properties as a function of composition is of primary importance in many applications from solar cells to sensors. View Full-Text
Keywords: SiGe; spectroscopic ellipsometry; optical properties SiGe; spectroscopic ellipsometry; optical properties
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Lohner, T.; Kalas, B.; Petrik, P.; Zolnai, Z.; Serényi, M.; Sáfrán, G. Refractive Index Variation of Magnetron-Sputtered a-Si1−xGex by “One-Sample Concept” Combinatory. Appl. Sci. 2018, 8, 826.

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