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Journal: Appl. Sci., 2018
Volume: 8
Number: 2583
Article:
Metrology of Nanostructures by Tomographic Mueller-Matrix Scatterometry
Authors:
by
Chao Chen, Xiuguo Chen, Yating Shi, Honggang Gu, Hao Jiang and Shiyuan Liu
Link:
https://www.mdpi.com/2076-3417/8/12/2583
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