Chen, C.; Chen, X.; Shi, Y.; Gu, H.; Jiang, H.; Liu, S.
Metrology of Nanostructures by Tomographic Mueller-Matrix Scatterometry. Appl. Sci. 2018, 8, 2583.
https://doi.org/10.3390/app8122583
AMA Style
Chen C, Chen X, Shi Y, Gu H, Jiang H, Liu S.
Metrology of Nanostructures by Tomographic Mueller-Matrix Scatterometry. Applied Sciences. 2018; 8(12):2583.
https://doi.org/10.3390/app8122583
Chicago/Turabian Style
Chen, Chao, Xiuguo Chen, Yating Shi, Honggang Gu, Hao Jiang, and Shiyuan Liu.
2018. "Metrology of Nanostructures by Tomographic Mueller-Matrix Scatterometry" Applied Sciences 8, no. 12: 2583.
https://doi.org/10.3390/app8122583
APA Style
Chen, C., Chen, X., Shi, Y., Gu, H., Jiang, H., & Liu, S.
(2018). Metrology of Nanostructures by Tomographic Mueller-Matrix Scatterometry. Applied Sciences, 8(12), 2583.
https://doi.org/10.3390/app8122583