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Journal: Appl. Sci., 2018
Volume: 8
Number: 2209
Article:
Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage
Authors:
by
Yindi Cai, Zhifeng Lou, Siying Ling, Bo-syun Liao and Kuang-chao Fan
Link:
https://www.mdpi.com/2076-3417/8/11/2209
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