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Journal: Appl. Sci., 2018
Volume: 8
Number: 2209

Article: Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage
Authors: by Yindi Cai, Zhifeng Lou, Siying Ling, Bo-syun Liao and Kuang-chao Fan
Link: https://www.mdpi.com/2076-3417/8/11/2209

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