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Journal: Applied SciencesVolume: 8Number: 2209
Article: Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage
  • Authors:
  • Yindi Cai1,
  • Zhifeng Lou1 and
  • Siying Ling1
  • et al.
Link: https://www.mdpi.com/2076-3417/8/11/2209

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