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Journal: Appl. Sci., 2022
Volume: 12
Number: 7946
Article:
Theoretical Exposure Dose Modeling and Phase Modulation to Pattern a VLS Plane Grating with Variable-Period Scanning Beam Interference Lithography
Authors:
by
Ying Song, Ning Zhang, Yujuan Liu, Liu Zhang and Zhaowu Liu
Link:
https://www.mdpi.com/2076-3417/12/15/7946
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