Exploiting the Combination of Displacement and Chemical Plating for a Tailored Electroless Deposition of Palladium Films on Copper
Abstract
1. Introduction
2. Materials and Methods
3. Results
3.1. Palladium Displacement Plating Characterization
3.2. Palladium Chemical Plating Characterization
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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| Bath | PdCl2 (as Pd) | HCl (37%) | ||
|---|---|---|---|---|
| mM | g∙L−1 | M | mL∙L−1 | |
| A | 9.4 | 1.66 | 0.6 | 50 |
| B | 28.2 | 5 | 2.6 | 216 |
| C | 0.56 | 0.1 | 0.006 | 0.5 |
| Reagent | Concentration |
|---|---|
| PdCl2 | 2 g∙L−1 |
| HCl (37%) | 4 mL∙L−1 |
| NH3 (28%) | 160 mL∙L−1 |
| NaH2PO2∙H2O | 10 g∙L−1 |
| NH4Cl | 27 g∙L−1 |
| Temperature | 55 °C |
| Deposition time | 60 min. |
| Sample | PDP Solution | Stirring | Deposition Time (s) |
|---|---|---|---|
| #1 | A | No | 30 |
| #2 | A | No | 90 |
| #3 | C | No | 30 |
| #4 | C | No | 90 |
| #5 | B | No | 30 |
| #6 | B | No | 90 |
| #7 | A | Yes | 30 |
| #8 | A | Yes | 90 |
| #9 | C | Yes | 30 |
| #10 | C | Yes | 90 |
| #11 | B | Yes | 30 |
| #12 | B | Yes | 90 |
| Sample | K-Ratio | EDS Thickness (nm) | Std. Dev. (±nm) |
|---|---|---|---|
| #1 | 0.006 | 1.7 | 0.3 |
| #2 | 0.015 | 4.2 | 0.3 |
| #3 | 0.000 | 0 | / |
| #4 | 0.003 | 0.8 | 0.3 |
| #5 | 0.039 | 10.6 | 0.3 |
| #6 | 0.084 | 22.2 | 0.2 |
| #7 | 0.010 | 2.8 | 0.3 |
| #8 | 0.034 | 9.3 | 0.3 |
| #9 | 0.004 | 1.1 | 0.3 |
| #10 | 0.022 | 6.1 | 0.3 |
| #11 | 0.070 | 18.6 | 0.2 |
| #12 | 0.168 | 41.7 | 0.4 |
| Sample | Average Thickness (μm) | Std. Dev. (±μm) |
|---|---|---|
| #6C | 1.59 | 0.16 |
| #8C | 1.69 | 0.18 |
| #10C | 1.78 | 0.06 |
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Fabbri, L.; Giurlani, W.; Biffoli, F.; Bellini, M.; Miller, H.; Fontanesi, C.; Vizza, F.; Innocenti, M. Exploiting the Combination of Displacement and Chemical Plating for a Tailored Electroless Deposition of Palladium Films on Copper. Appl. Sci. 2021, 11, 8403. https://doi.org/10.3390/app11188403
Fabbri L, Giurlani W, Biffoli F, Bellini M, Miller H, Fontanesi C, Vizza F, Innocenti M. Exploiting the Combination of Displacement and Chemical Plating for a Tailored Electroless Deposition of Palladium Films on Copper. Applied Sciences. 2021; 11(18):8403. https://doi.org/10.3390/app11188403
Chicago/Turabian StyleFabbri, Lorenzo, Walter Giurlani, Fabio Biffoli, Marco Bellini, Hamish Miller, Claudio Fontanesi, Francesco Vizza, and Massimo Innocenti. 2021. "Exploiting the Combination of Displacement and Chemical Plating for a Tailored Electroless Deposition of Palladium Films on Copper" Applied Sciences 11, no. 18: 8403. https://doi.org/10.3390/app11188403
APA StyleFabbri, L., Giurlani, W., Biffoli, F., Bellini, M., Miller, H., Fontanesi, C., Vizza, F., & Innocenti, M. (2021). Exploiting the Combination of Displacement and Chemical Plating for a Tailored Electroless Deposition of Palladium Films on Copper. Applied Sciences, 11(18), 8403. https://doi.org/10.3390/app11188403

