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Open AccessArticle

An Approach to the Extreme Miniaturization of Rotary Comb Drives

1
Department of Information Engineering, Electronics and Telecommunications, University of Rome La Sapienza, 00156 Rome, Italy
2
Institute of Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy
3
University of Rome Niccolò Cusano, 00156 Rome, Italy
4
Department of Engineering, University of Roma Tre, 00156 Rome, Italy
*
Author to whom correspondence should be addressed.
Actuators 2018, 7(4), 70; https://doi.org/10.3390/act7040070
Received: 7 September 2018 / Revised: 2 October 2018 / Accepted: 6 October 2018 / Published: 11 October 2018
(This article belongs to the Special Issue Micromanipulation)
The evolution of microelectronic technologies is giving constant impulse to advanced micro-scaled systems which perform complex operations. In fact, the actual micro and nano Electro-Mechanical Systems (MEMS/NEMS) easily integrate information-gathering and decision-making electronics together with all sorts of sensors and actuators. Mechanical manipulation can be obtained through microactuators, taking advantage of magnetostrictive, thermal, piezoelectric or electrostatic forces. Electrostatic actuation, more precisely the comb-drive approach, is often employed due to its high versatility and low power consumption. Moreover, the device design and fabrication process flow can be simplified by compliant mechanisms, avoiding complex elements and unorthodox materials. A nano-scaled rotary comb drive is herein introduced and obtained using NEMS technology, with an innovative design which takes advantages of the compliant mechanism characteristics. A theoretical and numerical study is also introduced to inspect the electro-mechanical behavior of the device and to describe a new technological procedure for its fabrication. View Full-Text
Keywords: microactuation; nanoactuation; comb drives; flexure hinge; nanofabrication; electron beam lithography microactuation; nanoactuation; comb drives; flexure hinge; nanofabrication; electron beam lithography
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MDPI and ACS Style

Veroli, A.; Buzzin, A.; Frezza, F.; De Cesare, G.; Hamidullah, M.; Giovine, E.; Verotti, M.; Belfiore, N.P. An Approach to the Extreme Miniaturization of Rotary Comb Drives. Actuators 2018, 7, 70.

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