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Actuators 2018, 7(1), 11;

Modeling a Pull-In Instability in Micro-Machined Hybrid Contactless Suspension

The Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
Author to whom correspondence should be addressed.
Received: 26 February 2018 / Revised: 16 March 2018 / Accepted: 16 March 2018 / Published: 20 March 2018
(This article belongs to the Special Issue Micromanipulation)
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A micro-machined hybrid contactless suspension, in which a conductive proof mass is inductively levitated within an electrostatic field, is studied. This hybrid suspension has the unique capability to control the stiffness, in particular along the vertical direction, over a wide range, which is limited by a pull-in instability. A prototype of the suspension was micro-fabricated, and the decrease of the vertical component of the stiffness by a factor of 25% was successfully demonstrated. In order to study the pull-in phenomenon of this suspension, an analytical model was developed. Assuming quasi-static behavior of the levitated proof mass, the static and dynamic pull-in of the suspension was comprehensively studied, also yielding a definition for the pull-in parameters of the hybrid suspension. View Full-Text
Keywords: contactless suspension; magnetic levitation; pull-in; MEMS; stability; dynamics contactless suspension; magnetic levitation; pull-in; MEMS; stability; dynamics

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Poletkin, K.V.; Korvink, J.G. Modeling a Pull-In Instability in Micro-Machined Hybrid Contactless Suspension. Actuators 2018, 7, 11.

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