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Actuators 2018, 7(1), 11; https://doi.org/10.3390/act7010011

Modeling a Pull-In Instability in Micro-Machined Hybrid Contactless Suspension

The Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
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Received: 26 February 2018 / Revised: 16 March 2018 / Accepted: 16 March 2018 / Published: 20 March 2018
(This article belongs to the Special Issue Micromanipulation)
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Abstract

A micro-machined hybrid contactless suspension, in which a conductive proof mass is inductively levitated within an electrostatic field, is studied. This hybrid suspension has the unique capability to control the stiffness, in particular along the vertical direction, over a wide range, which is limited by a pull-in instability. A prototype of the suspension was micro-fabricated, and the decrease of the vertical component of the stiffness by a factor of 25% was successfully demonstrated. In order to study the pull-in phenomenon of this suspension, an analytical model was developed. Assuming quasi-static behavior of the levitated proof mass, the static and dynamic pull-in of the suspension was comprehensively studied, also yielding a definition for the pull-in parameters of the hybrid suspension. View Full-Text
Keywords: contactless suspension; magnetic levitation; pull-in; MEMS; stability; dynamics contactless suspension; magnetic levitation; pull-in; MEMS; stability; dynamics
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Poletkin, K.V.; Korvink, J.G. Modeling a Pull-In Instability in Micro-Machined Hybrid Contactless Suspension. Actuators 2018, 7, 11.

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