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Journal: Machines, 2023
Volume: 11
Number: 664
Article:
A New Slurry for Photocatalysis-Assisted Chemical Mechanical Polishing of Monocrystal Diamond
Authors:
by
Junyong Shao, Yanjun Zhao, Jianhui Zhu, Zewei Yuan, Haiyang Du and Quan Wen
Link:
https://www.mdpi.com/2075-1702/11/6/664
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